JPH0633679Y2 - インダクションプラズマ用トーチ - Google Patents
インダクションプラズマ用トーチInfo
- Publication number
- JPH0633679Y2 JPH0633679Y2 JP5974388U JP5974388U JPH0633679Y2 JP H0633679 Y2 JPH0633679 Y2 JP H0633679Y2 JP 5974388 U JP5974388 U JP 5974388U JP 5974388 U JP5974388 U JP 5974388U JP H0633679 Y2 JPH0633679 Y2 JP H0633679Y2
- Authority
- JP
- Japan
- Prior art keywords
- circular pipe
- gas
- end wall
- torch
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000006698 induction Effects 0.000 title claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 239000010453 quartz Substances 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 39
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Plasma Technology (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5974388U JPH0633679Y2 (ja) | 1988-05-02 | 1988-05-02 | インダクションプラズマ用トーチ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5974388U JPH0633679Y2 (ja) | 1988-05-02 | 1988-05-02 | インダクションプラズマ用トーチ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01161600U JPH01161600U (en]) | 1989-11-09 |
| JPH0633679Y2 true JPH0633679Y2 (ja) | 1994-08-31 |
Family
ID=31285490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5974388U Expired - Lifetime JPH0633679Y2 (ja) | 1988-05-02 | 1988-05-02 | インダクションプラズマ用トーチ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0633679Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7806077B2 (en) * | 2004-07-30 | 2010-10-05 | Amarante Technologies, Inc. | Plasma nozzle array for providing uniform scalable microwave plasma generation |
-
1988
- 1988-05-02 JP JP5974388U patent/JPH0633679Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01161600U (en]) | 1989-11-09 |
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